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2004: PhD in Electrical Engineering (5th of January, 2004), Catholic University of Leuven, Belgium.
PhD thesis title: Novel applications of ellipsometry and solvent probes for characterizing Cu/low-k dielectric materials for advanced semiconductor interconnects. (download pdf 2.3 Mb) You can get a softcover copy of my thesis comletely free of charge. Just send me an e-mail (denis_shamiryan@hotmail.com) with your address.
1996: MSc (Diploma cum laude) in Microelectronics, Novosibirsk State Technical University, Russia.
Master thesis title: Investigation of interaction of SiFx layer with xenon difluoride.
1990: Secondary school diploma cum laude, Novosibirsk, Russia
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Semiconductor industry equipment
- Dry etch (200 mm:Lam TCP9400, Versys 2300, Exelan, 300 mm: Lam Kyio)
- Strip (dry - Mattson/wet - Semitool)
- Molecular beam epitaxy
- Measurement (spectroscopic ellipsometry, SEM, XPS)
Languages
- Russian (native)
- English (fluently)
- Dutch (almost fluently)
- French (studying, survival level for France)
- German (basic knowledge)
Computers
- Advanced user (Windows, MS office, Internet etc.)
- Some programming (basic knowledge of C, Pascal, Fortran, Visual basic, HTML, JavaScript)
- Hardware (can assemble a PC)
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Recommendations can be obtained from the following people
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Prof. Dr. Karen Maex
IMEC research coordiantor
maex@imec.be
IMEC, Kapeldreef 75
3001 Leuven, Belgium
Dr. Serge Vanhaelemeersch
Head of Advanced Deposition and Removal Technologies department
vhaele@imec.be
IMEC, Kapeldreef 75
3001 Leuven, Belgium
Dr. Mikhail Baklanov
Senior Scientist
baklanov@imec.be
IMEC, Kapeldreef 75
3001 Leuven, Belgium
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